Smart integrated – customer-specific power supply
involved in semiconductor production
Solutions for extremely high requirements
Semiconductor production requires a high-precision and integrated power supply. It is guaranteed by FuG power supplies. Customized solutions are used here as well as Basic or Professional series – for example in the context of ion implantation, lithography and microscopy. Capacitors need to be tested on isolation voltage and need to be formatted during the manufacturing process and also in distinct intervals during the application period.
Medium and high voltage power supplies with high control dynamics and also high stability. 30kV – 150kV, 700W – 20kW.
For high voltage power supplies with low power and specific control and output circuitry. Up to 2kV, up to 1 mA, cassette power supply.
We often have industrial applications with extremely high requirements for high voltage stability. For the testing of LCD screens during the manufacturing process such electron microscopes are needed. 10kV -20kV, low current, high precision, with auxiliary supplies.
Smallest structures in the range of nanometers are created on semiconductor or other substrates. The requirements are similar to electron microscopy, but for lithography the regulation of the electron beam current has to cover a larger power range. 20kV – 70kV, low current (mA), auxiliary power supplies, very high stability, low ripple.
Components need to be frequently tested for dielectric strength, current conduction and switching behavior. Range 800V – 20.000V, up to 10kW, high/heavy current pulses up to 3000A. High current pulses up to 3000A.
Capacitor tester/forming systems:
Capacitors must be tested for their dielectric strength and formed during the manufacturing process or during subsequent application. Range 800V – 20,000V, up to 10kW.
Components often need to be tested on withstand voltage. 800V – 20.000V, 7W – 500W.