Microscopy

FuG Elektronik GmbH, Florianstraße 2, 83024 Rosenheim, GERMANY

With an Electron Microscope a considerably higher resolution (at present approximately 0.1 nm) can be reached than with a light microscope. High voltage supplies for electron microscopes usually consist of a set of connected to each other (switched in parallel or in series) low power voltage sources to supply the different electrodes to control the electron beam. High requests have to be fulfilled regarding the stability and the interaction of the voltage sources.

One distinguishes transmission electron microscopes and scanning electron microscopes. Since the resolution is dependent on the wavelength, it increases with the energy of the used electrons and therefore with the accelerating voltage. On the other hand the penetration depth also increases at higher beam energy so that for surface examinations is used the so-called "Low Energy Electron Microscopy" LEEM, at which the requirements on the stability of the acceleration, focusing and deflecting voltages are particularly high.

Principle (Secondary electron scanning microscope):

Example:

HCV 252MM - 15000: High voltage power supply for LEEM

Basic potential:	0 - 15kV, max. 1mA
Object potential:	-5V - +2kV
Bombardment:	0 - 1,5kV, 0 - 100mA
Lower field:	-2kV - +5kV
Aperture 1:	0 - 10kV, max. 1mA
Aperture 2:	0 - 15kV, max 1 mA
Filament:	0 - 5A, max 10V, Emission current regulation
Voltage sources partitionally on high potential, Stability values up to 0,8 ppm.

zur deutschen Version

03.12.07 14:48

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Telefax +49 8031 81099
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